Subwavelength structures for broadband antireflection application

Abstract

The subwavelength structures are designed and fabricated for broadband antireflection application. Under target of zero reflectivity, the parameters of periodic 2-D continuous conical structures are analyzed by the finite-difference time-domain (FDTD) method. The corresponding conical structures are obtained with spatial period of 350 nm and structure height of 300 nm, respectively. The 2-D continuous conical structured surface is fabricated by micro-replication process combining with the originated structure fabrication realized by interference lithography, Ni mold electroplation and replication by using UV imprinting into plastics. The average reflectances of the simulation and replicated polymer prototype are about 0.50% and 0.54% within the spectral ranges of 400-650 nm, respectively. In a word, the subwavelength structured surface with low reflection is developed and proved to be highly consistent with the simulation results. (C) 2008 Elsevier B.V. All rights reserved.