利用半導體製程製作微小化之QCM 陣列生物感測器

Abstract

石英晶體微天平 (QCM) 為一種高靈敏度、選擇性及穩定性之感測元件，近年來也成為一種廣泛研發之生物感測器。QCM的振盪頻率會隨著表面質量因生化反應產生的變化而改變，例如抗原、抗體專一結合的免疫反應、以及序列互補的核酸雜交反應等，訊號可即時偵測，故時效性優於一般傳統的生化檢測。 本文擬藉由半導體之製程方法在AT切面石英上加工以解決石英震盪器不易縮小化之問題。探討製程中石英振盪器結構對應諧振頻率的影響，進而提出石英振盪器微小化及陣列化的初步流程，並建構一套適合平行檢測大量資訊的生物微陣列感測石英晶體微天平系統，對於石英震盪器在檢測器上之應用是一大進展。

Quartz crystal microbalance (QCM) is widely used in the biosensor field due to its high sensitivity, selectivity, and stability. The resonance frequency of QCM is associated with a mass change by some biological specific reaction such as hybridization between the complementary oligonucleotides or immunoreactions between antibody and antigen. One subject is performed in this paper. Systematical experiments are designed to study the fabrication parameters in semiconductor process. An improved fabrication process can achieve miniature and array bio-QCM sensor system.