以萃思創新理論解決晶圓製造廠研磨區品質衝突之研究

Abstract

品質衝突存在競爭的市場環境，主要來自顧客多品質要求，例如，快速達交，低成本，保持品質穩定，相對技術瓶頸若無法突破，品質衝突接踵而來。 因此，解決品質衝突，符合客戶的要求，最需要的是有效的管理方法。在技術上，萃思理論提供一套有系統的創意管理。目前萃思創新設計方法非常受到設計工程師關注，設計者可以依循萃思理論正確的找出工程技術問題的矛盾參數，套用矛盾矩陣表，使用物質-場方法來找出技術上的瓶頸，加上實驗設計理論分析，提供解決品質衝突的方向。 本文的創新管理即將萃思方法無法量化的缺點加以改良，結合田口實驗設計的敏感度分析之優點，其中，增加有用的資源及消除有害的資源之兩者共通性，突破技術上的瓶頸，解決品質衝突問題。本文中，以半導體晶圓研磨製程品質衝突實際範例結果來證明萃思創新結果之可行性。相信在使用萃思方法時，若能搭配本文提出的建議與方法，一定能讓創意使用者在使用萃思方法時更有效率。

Quality conflicts exist in a competitive market, and come from customer’s large quality require mainly, for example, quickly delivery, lower cost and keep quality steady. Sometimes corrosponsive technology bottleneck get difficult to break through, unfortanlty, the quality conflicts come one after another. Therefor, to solve quality conflicts effieiency and to accord with customer’s demand, the effective and powerful management method is necessary. Nowadays, TRIZ theory has been the innovative and systematic way to manage technology. In other words, it is the most popular innovative design in solving engineering problems. The TRIZ theory not only helps all engineers find out the technique contradiction parameter exactly but also use conflicts matrix and applies substance field to discover technical bottleneck, in addition, combining experiment design analyses properly, offer and solve direction of quality conflicts. In the paper, innovative management not only improves the shortcoming of unable quantification and also combines sensitive analysis of Taguchi Method. It includes the commonness of advantages of increasing useful resources and eliminating harmful resources, breaking through technical bottleneck and solving quality conflicts. In practical case, in this paper, semiconductor process in CMP quality conflict of example proves the TRIZ innovation results. I believe that it would be more effective if creative users match suggestions and ideas when using the TRIZ theory. The old model evaluates enterprise’s wealth only with productivity, profit and property assets and it only focuses on management performances on short-term interests or competitiveness.