RFID在半導體廠生產管理之應用探討

Abstract

無線射頻識別(Radio Frequency Identification，RFID)技術具備了可無線資料辨識/收集，可同時讀取多筆資料…等特性，近年來廣受各方的注目，被認為是影響未來全球產業發展之重要技術。特別是沃爾瑪(Wal-Mart)與美國國防部均於2003年宣佈導入無線射頻識別技術之應用後，無線射頻辨識技術一躍而為全球熱門新科技，其應用日益廣泛。對半導體產業對RFID來說，它不只是RFID晶片的製造生產而已，就半導體產業生產之高精確要求，高複雜度，高產量與長生產週期等特性，正適合導入RFID系統進行管理。目前已知有超過30座晶圓廠在使用RFID [Asyst Technologies, Inc.網站]，然其實施與導入之實際情形，相關資訊尚不多見。本研究希望能引領RFID的特性與功能，將其發揮在半導體產業生產管理上。 本論文由半導體產業製造管理了解開始，並介紹相關RFID之概念與應用。由找出RFID在半導體晶圓製造過程中的適用性，與過去使用條碼系統和Smart Tag紅外線標籤進行比較，提出其可行之晶圓廠設置與運作概念架構，及其導入模式。並輔以與專案負責人訪談方式，整理相關實際導入經驗與遭遇困難，以供其他有意導入之晶圓廠參考。

RFID (Radio Frequency Identification) technology has attracted the global interests and will impact the future global industrial development due to its properties of wireless data identifying/collecting, multiple reading at the same time, etc. The intrinsic characteristic of semiconductor manufacturing, such as highly accuracy request, highly complex processes, high yield rate, long production cycle time and re-entrant, is just suited with the application of RFID. There are more than 30 semiconductor Fabs has installed with RFID system. However, there are still very few related information have been published about the actual status of implementation and execution of FRID system for semiconductor production management. This research presents the features of RFID first. Then, a comparison of RFID with both Barcode system and Smart Tag(Infrared Tag) was given. Finally, a feasible frame and possible approaches for implementing RFID systems on a semiconductor FAB was proposed after interviewing with experts of RFID system project leader/manager of semiconductor Fabs.