細水霧滅火系統於應用於濕式清洗台之探討

Abstract

日月光大火與茂迪爆炸案以及東雲氣爆案，再度暴露產業界對於廠內火災爆炸之預防工作尚有待改進之處，由過往華邦、聯瑞、天下…等電子公司所發生的火災事件之經驗顯示，預防災害發生的重點在於針對生產製程與廠房內容物的特性，系統化篩選辨識重大潛在危害事件的危害條件與後果，並藉由工程工具之應用模擬分析事故發生之經過，做為進行工程改善與建立緊急應變系統之依據，如此方能有效將危害事件發生的嚴重性與規模降至最低的程度。在經濟低迷的此時，朝逢意外事故的發生將使企業嚴重錯失商機，對我國經濟發展將造成巨大的損失，因此有效的火災風險控與完整的防災系統規劃更形重要。 高科技廠房建造成本昂貴，製程設備多為高科技設備或專為相關製程而生產的機台設備，廠房內使用的化學品種類多且量大，相對在火災預防及管理上更顯重要。本文以危害風險為中心思想，輔以危害評估手法鑑別出高科技廠房(LED廠)之高風險設備機台，作為火災預防的主要對象，經過系列的風險評估及歷史經驗發現，濕式清洗台由於製程特性，所使用之清洗液普遍具易燃特性且機台伴隨加熱源故火災風險高，再加上為防止金屬腐蝕，機台常以塑膠類機殼所製成燃載量高，導致長久以來濕式清洗台成為半導體廠普遍火災風險較高的危害源，而依據FM的統計資料(1977-1997)，半導體廠房內意外事故，以(Wet Bench)發生的次數最高。因此本論文將防護對象鎖定於LED產業風險較高之濕式清洗台，並探討以細水霧系統應用於濕式清洗台之滅火效能及可行性。

The occurrences of the fire accident of Advanced Semiconductor Engineering Inc. (ASE Inc.), explosion accident of Motech Industries Inc. and gas explosion accident of Tuntex Distinct Corp. in recent years reveals that there still exists a lot of room for improvement in preventing fire and explosion incident from occurring inside the plants or fabs for the industrial circles. In addition, according to the experiences of fire accidents that previously occurred in electronic companies, such as Winbond, UICC, Advanced Microelectronic Products Inc. etc., it shows that the key for preventing hazardous occurrence is aiming at the characteristics of production process and contents inside the plant or fab with systematically sieving out. It recognizes the condition and consequence of major potential hazardous events, as well as uses the application of engineering tools to conduct the simulation and analysis to the occurring course of accidents. After that it can apply the analyzed results as the basis for carrying out the engineering improvement and establishing the emergency response system. Thus, it is able to reduce the occurring seriousness and scale of the hazardous events to the minimum level. Currently, while we’re experiencing the economic depression, the occurrence of unexpected accidents may cause enterprises to mistakenly lose many business opportunities and that will result in enormous loss to our economic development; therefore, the effective fire risk control and the complete planning of disaster prevention system become more important. The construction cost of high-tech plants and fabs is very expensive, and most manufacturing process equipment is the high-tech apparatus or machinery equipment specifically produced for related manufacturing process; in addition, various types and large volume of chemicals are used inside the plants and fabs, thus it is relatively important for the fire prevention and management. This work adopts the hazard risk as its core concept and along with the approaches of risk assessment to identify the machinery equipment with higher risk in the high-tech plants and fabs (LED plants/fabs) as the main subject of fire prevention. Furthermore, after implemented the a series of risk assessment and reviewed the historic experiences, it found that due to its manufacturing process characteristics, the cleaning solution used in wet bench usually is flammable and it usually operates along with heat source; therefore, the fire risk of wet bench is enormously high. Additionally, in order to prevent the metal corrosion, the machinery part of wet bench is usually made of plastic case, which contains a high fire load; as a result, the web bench has become the hazardous source with higher fire risk for semiconductor fabs commonly. According to the statistical data of FM (1977-1997), the highest occurring frequency of the accident inside the semiconductor fabs is the wet bench. As a result, in this work, the subject is focused on the wet bench and conducts an investigation on the application of water mist system to the fire extinguishing efficiency and feasibility for the wet bench.