FMEA應用於降低廠務監控系統運轉風險之探討 - 以半導體廠氣體化學系統為例

Abstract

光電及半導體業界近幾十年來蓬勃發展，建廠及擴廠計畫如雨後春筍此起彼落，兩者皆屬高技術和高資金密集產業，對於製程設備而言，無論是產能、良率，甚至於製程安全，或是設備故障診斷，更顯得重要。但製程設備機台故障僅影響單一機台或局部區域產能，廠務設施或系統失效故障則影響全廠產能及良率，甚至可能造成全廠安全事故導致嚴重後果，故如何確保廠務設施運轉穩定及供應品質符合要求，並減少故障等造成工業安全事件之異常發生，為廠內廠務及工安部門之迫切課題。 早期廠務系統設施的故障診斷，是由維護工程師與原廠工程師根據設備運轉監控系統傳來的異常警報，以及利用自己知識和診斷經驗，進行分辨判斷故障發生的原因，提出排除故障的方法與策略。但對於光電半導體業而言，其高成本的投資，加以營運管理風險高，廠務設備的複雜度提高，使得廠務工程師對設備迅速進行故障診斷及縮短維護時間以增加稼動率之要求提高。 廠務系統中監控整合系統(Facility Monitoring and Controlling System， FMCS)為其中最重要之一環，現場運轉狀況或異常可藉由感測器或儀表等即時呈現於監控系統並發出警報，以便值班人員或系統負責人立即進行處理。早期監控系統並未受重視，但由歷年異常事件彙整統計分析，可發現隨著監控系統逐漸增加統計、管理及決策分析等功能，監控系統異常可能導致全廠或大部分廠務系統失效(或故障)，同時造成產能及良率嚴重影響及損失，近年業界發生全廠控制系統失效異常之案例已逐年增加。 失效模式與效應分析（Failure Mode and Effects Analysis， FMEA）是用來分析系統內潛在及高重要性之失效模式，並對此失效可能造成之後果及影響提出適當之改善措施，以防止失效(故障)的發生，避免人員安全及財產損失。設計及建廠工程師透過嚴密的分析作業列出並評估廠務系統內可能失效之模式及可能造成之影響，使設計及建廠作業得以被改進，並配合不斷地預估、驗證及改進，使得廠務系統逐漸趨向最佳設計之目標。由相關文獻得知 FMEA 被廣泛地應用於航空、航太、汽車、工業製品及民生用品等有形產品之設計。本研究擬對此有所突破，係利用 FMEA 來探討高科技廠房廠務監控系統(Facility Monitoring and Controlling System， FMCS)風險評估，以導入安全聯鎖設計概念(Safety Interlock System)提升廠務監控整體安全整合等級SIL(Safety Integrity Level， SIL)，俾提昇系統之運轉可靠度及可用度，達到降低運轉風險及降低異常損失之成本效益。 在本研究中，以某晶圓廠來說明整個 FMEA 於 FMCS系統的分析流程。並藉由分析之過程，讓該廠之廠務運轉人員重新檢視系統，並讓系統負責工程師們了解到該系統究竟存在有哪些失效風險；一旦發生失效後，其影響的層面、範圍有多廣，衝擊有多大，其因應、預防策略為何。而分析之結果及改善建議，則提供該廠務部門運轉及建廠小組，於未來在擬定系統檢修維護、保養計劃、改善措施時，及建廠系統設計計劃時之重要參考依據。並據此不斷地修改系統，以提昇系統之可靠度，提供達到系統穩定運轉之目標。 經由研究結果顯示，該個案廠在導入 FMEA 分析方法後，可明確解析出重要失效模式並據以提出改善措施並執行，使異常損失明顯減少，達到提升監控系統可靠度及可用度之要求。

The photoelectricity and the semiconductor field near for several dozens year vigorous developments, put up a factory and expand the factory plan like mushroom growth continually, both all are high-tech and the high fund crowded industry, speaking of the system regulation equipment, regardless of is produces can, good rate, even makes the regulation security, perhaps the equipment failure diagnosis, appears importantly.But the system regulation equipment radio station breakdown only affects the sole radio station or the partial region produces energy, the factory serves the facility or the system expiration breakdown affects the entire factory to produce can and good rate, even possibly creates the entire factory security accident to cause the serious results, therefore how guarantees the factory to serve the facility revolution stable and the supply quality conforms to the requirement, and reduces the breakdown and so on to create the industrial safety event exceptionally to occur, for factory in factory service and labor peaceful department urgent topic. The early factory service system facility breakdown diagnosis, is by maintains engineer and original factory engineer the unusual warning which transmits according to the equipment revolution supervisory system, as well as using oneself knowledge and the diagnosis experience, carries on the reason which the resolution diagnosis occurs, proposes the elimination breakdown method and the strategy.But speaking of the photoelectricity semiconductor industry, its high cost investment, performs transport business management risk to be high, the factory service equipment order of complexity enhancement, causes the factory to serve engineer to carry on the breakdown diagnosis and the reduction maintenance time rapidly to the equipment increases request of the crops pace to enhance. In the factory service system the monitoring conformity system (Facility Monitoring and Controlling System, FMCS) is a most important link, the scene revolution condition either exceptionally may and so on presents immediately because of the sensory element or the measuring appliance in the supervisory system and sends out the warning, in order to the attendant or the system person in charge carry on processing immediately.The early time supervisory system receives by no means takes, but collects the entire statistical analysis by the all previous years unusual event, detectably gradually increases functions and so on statistics, management and decision analysis along with the supervisory system, the supervisory system exceptionally possibly causes the entire factory either the majority of factory service system expires (or breakdown), simultaneously creates produces can and the good rate serious influence and the loss, recent years the field had the entire factory control system to expire exceptionally the case to increase year by year. The Failure Mode and Effects Analysis(FMEA) is uses for to analyze in the system latent and expiration pattern the high important, regarding this and expires possibly creates the consequence and the influence proposed the suitable improvement measure, prevented expiration (breakdown) the occurrence, avoids the personal security and the property damage.Designs and puts up a factory engineer to penetrate the strict analysis work to list and to appraise in the factory service system pattern of the possible expiration and possibly has the influence, causes to design and to put up a factory the work to be able to improve, and coordinates to estimate unceasingly, the confirmation and the improvement, causes the factory service system to tend to goal of gradually the best design.By the correlation literature knew FMEA widely is applied in the aviation, the aerospace, the automobile, the industry product and the livelihood of the people thing and so on design the visible product.This research draws up has the breakthrough regarding this, is discusses the high tech workshop factory service supervisory system using FMEA (Facility Monitoring and Controlling System, FMCS) the risk assessment, inducts the safety interlocking design concept (Safety Interlock System) to promote factory service monitoring overall security conformity rank SIL (Safety Integrity Level, SIL), enables revolution margin of safety and the availability the promotion system, achieved reduces the revolution risk and reduces of cost benefit the exceptionally loss. In this research, explains entire FMEA by some wafer factory in the FMCS system analysis flow.And process of because of the analysis, lets factory of service revolution personnel this factory inspect the system, and lets the system be responsible for engineers understand actually this system does exist has which to expire the risk; Once after has the expiration, its influence stratification plane, the scope have broadly, the impact has in a big way, it in accordance to, prevention strategy why.But result of and improvement suggestion the analysis, then provides this factory service department to revolve and to put up a factory the group, in the future when will draw up the system overhaul maintenance, the maintenance plan, the improvement measure, and puts up a factory time the system design plan the important reference.According to the above and revises the system unceasingly, promotes margin of safety of the system, provides achieves goal of the system steady running. Demonstrated by way of the findings, this case factory after inducts the FMEA analysis method, but analyzes the promotion supervisory system margin of safety and the availability request explicitly the important expiration pattern and according to proposed the improvement measure and carries out, causes exceptionally to lose reduces obviously, achieves.