标题: | 应用于生医感测与高速网路之互补式金氧半光侦测器 CMOS Photodetectors for Biomedical Detections and High-Speed Networks |
作者: | 張育維 Chang, Yu-Wei 黃遠東 Huang, Yang-Tung 電子研究所 |
关键字: | 互补式金氧半光侦测器;生医感测;高速网路;CMOS Photodetectors;Biomedical Detections;High-Speed Networks |
公开日期: | 2008 |
摘要: | 本研究提出四种应用于生医感测与高速网路之积体互补式金氧半(CMOS)光侦测器,研究内容包含了设计、分析、制作、与量测。在生医感测的应用上,提出P+/Nwell指状光二极体(finger photodiode)搭配转阻放大电路(trans-impedance amplifier),可量测过氧化氢(H2O2)、葡萄糖(glucose)与组织胺(histamine)的最低浓度分别为1 μM、1 μM与10 μM;提出基板浮接(floating bulk)环状光电晶体(ring-shaped phototransistor)搭配外环光二极体,在可见光波段具有高于1000 A/W的响应度(responsivity),对于辣根过氧化□(HRP)的检测极限为2.7 pM。在高速网路的应用上,提出的网状空间调变光二极体(spatially modulated photodiode),可有效地把光电流中的慢速成分扣除,所设计制作的元件展现出5.5 GHz的高频宽;提出之具深Nwell层的PIN光二极体,其深Nwell层被连接到高电位以排除在Psub层所产生的慢速扩散载子,所设计制作的元件对于50 Ω负载可达800 mVpp输出电压与2.5 Gbps操作速度。所开发之光侦测器效能皆比文献上其他金氧半光侦测器高。 The design, analysis, manufacture, and measurements of the four integrated CMOS photodetectors for biomedical detections and high-speed networks are presented. For biomedical applications, the proposed P+/Nwell finger photodiode with a trans-impedance amplifier demonstrated that the minimum concentration successfully detected for H2O2, glucose, and histamine were 1 μM, 1 μM, and 10 μM, respectively; the proposed ring-shaped phototransistor with a floating bulk enclosed by a ring-shaped photodiode exhibited a responsivity higher than 1000 A/W for the visible spectrum range and a detection limit of 2.7 pM for HRP (horse-radish peroxidase). For high-speed applications, the meshed SMPD (spatially modulated photodiode) can effectively subtract the deferred portion from the immediate portion of the photocurrent, and the manufactured device demonstrated a high bandwidth of 5.5 GHz; the proposed DNW-based (deep-Nwell-based) PIN photodiode, in which the slowly diffusive carriers generated in Psub are decoupled from the photocurrent by connecting the DNW to a positive supply voltage, was capable of outputting 800 mVpp with up to 2.5 Gbps for 50-Ω loads. These proposed photodetectors exhibited better performances than other reported CMOS photodetectors. |
URI: | http://140.113.39.130/cdrfb3/record/nctu/#GT009311814 http://hdl.handle.net/11536/78175 |
显示于类别: | Thesis |
文件中的档案:
If it is a zip file, please download the file and unzip it, then open index.html in a browser to view the full text content.