新穎非對稱準光子晶體共振腔之製程技術與其WGM模態特性探討

Abstract

在本篇論文當中，我們使用三維有限時域差的方法去計算出兩種非對稱性光子晶體雷射的共振頻譜、和共振場圖。這些有效的計算方法幫助我們能最佳化我們的光子晶體設計，並且把這些設計確實的應用在我們的製程當中。

在製程的篇章中，主要分為兩大部分去介紹，分別是準光子晶體雷射底部是高反射率布拉布拉格反射鏡及底部為中央支柱兩種結構的製程。首先主動層及DBR使用直接接合的技術成功接合。我們並成功的把光子晶體寫在主動層與DBR接和的晶片上面以及成功的製造出底部為中央支柱的準光子晶體雷射。以上的製程步驟和遇到的困難以及解決方法都詳細的寫在內容中。

最後，利用自行架設的micro-PL系統把我們製程出來的所有元件做量測與討論。從量測的結果與模擬的結果去討論，可以得知我們量測到的發光模態與我們預測的是相同的。並且比較不同支柱大小的準光子晶體雷射的特性以及將有中央支柱的結構與傳統的對稱性薄膜做比較。

We calculated the resonance spectra and resonance mode profile of the 12-fold quasi-Periodic photonic crystal microcavity Laser with bottom DBR and 12-fold quasi-Periodic photonic crystal microcavity Laser with central post by 3-dimension finite-difference time-domain method. These help us to optimize our photonic crystal laser. And two kind of novel asymmetric 12-fold quasi-periodic photonic crystal microcavity Laser were designed.

In fabrication, we introduced the procedures for two different structures. In the bottom DBR structure, the wafer fusion technology was developed. And the photonic crystal pattern was defined on the bonded sample successfully. In the central post structure, the different size of central post is achieve by well design photonic crystal pattern and different wet etching process time.

The basic characteristic of 12-fold quasi-periodic photonic crystal microcavity Laser with central post were measured by a micro-scale photoluminescence system, Furthermore, the characteristic were compared with different post size and membrane structure. From the measurement, we observe the influence of the central post.