标题: 镜面可调式内视镜的研究---子计画II:内视镜用热动式微致动机构的设计与制作(II)
Design and Fabrication of Thermally Driven Micro Mechanisms (II)
作者: 徐文祥
HSU WENSYANG
交通大学机械工程系
关键字: 微致动器;微反射镜;电-热驱动;内视镜;可调式镜面;复晶矽;Microactuator;Micromirror;Electro-thermally driven;Endoscope;Adjustable mirror;Polysilicon
公开日期: 2000
官方说明文件#: NSC89-2218-E009-005
URI: http://hdl.handle.net/11536/88456
https://www.grb.gov.tw/search/planDetail?id=525728&docId=95651
显示于类别:Research Plans


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