标题: | 镜面可调式内视镜的研究---子计画II:内视镜用热动式微致动机构的设计与制作(II) Design and Fabrication of Thermally Driven Micro Mechanisms (II) |
作者: | 徐文祥 HSU WENSYANG 交通大学机械工程系 |
关键字: | 微致动器;微反射镜;电-热驱动;内视镜;可调式镜面;复晶矽;Microactuator;Micromirror;Electro-thermally driven;Endoscope;Adjustable mirror;Polysilicon |
公开日期: | 2000 |
官方说明文件#: | NSC89-2218-E009-005 |
URI: | http://hdl.handle.net/11536/88456 https://www.grb.gov.tw/search/planDetail?id=525728&docId=95651 |
显示于类别: | Research Plans |
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