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DC FieldValueLanguage
dc.contributor.author趙天生en_US
dc.contributor.authorCHAO TIEN-SHENGen_US
dc.date.accessioned2014-12-13T10:28:44Z-
dc.date.available2014-12-13T10:28:44Z-
dc.date.issued2007en_US
dc.identifier.govdocNSC96-2221-E009-189zh_TW
dc.identifier.urihttp://hdl.handle.net/11536/88580-
dc.identifier.urihttps://www.grb.gov.tw/search/planDetail?id=1471819&docId=264231en_US
dc.description.sponsorship行政院國家科學委員會zh_TW
dc.language.isozh_TWen_US
dc.title氣化氫氟酸在奈米金氧半電晶體之應用及其設備之開發(III)zh_TW
dc.titleProcesses and System Development of HF-Vapor for Nano MOSFETs' Application(III)en_US
dc.typePlanen_US
dc.contributor.department國立交通大學電子物理學系(所)zh_TW
Appears in Collections:Research Plans