半導體廠自動化設備控制界面程式模組化建構之研究

Title:	半導體廠自動化設備控制界面程式模組化建構之研究 The Construction of a Modularized Machine and Monitoring Emulater for a Wafer Fab
Authors:	彭德保 PERNG DER-BAAU 交通大學工業工程與管理系
Keywords:	自動化設備控制界面程式;模組化;結構化方法;Automatic equipment control interface;Modularized;Structured methodology
Issue Date:	2000
Gov't Doc #:	NSC89-2212-E009-028
URI:	http://hdl.handle.net/11536/89311 https://www.grb.gov.tw/search/planDetail?id=513735&docId=93107
Appears in Collections:	Research Plans

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