近場光聲顯微術在奈米尺度異結構殘留應力的量測研究(III)

標題:	近場光聲顯微術在奈米尺度異結構殘留應力的量測研究(III) Determination of Residual Stresses in Nanometer Scale Heterosturctures Using Near-field Photoacoustic Microscopy(III)
作者:	尹慶中 YIN CHING-CHUNG 交通大學機械工程系
公開日期:	2005
官方說明文件#:	NSC94-2212-E009-003
URI:	http://hdl.handle.net/11536/90276 https://www.grb.gov.tw/search/planDetail?id=1114345&docId=211465
Appears in Collections:	Research Plans

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