ALD在Damascene銅製程應用之研究(III)

Full metadata record

DC Field	Value	Language
dc.contributor.author	陳智	en_US
dc.contributor.author	Chen Chih	en_US
dc.date.accessioned	2014-12-13T10:31:05Z	-
dc.date.available	2014-12-13T10:31:05Z	-
dc.date.issued	2005	en_US
dc.identifier.govdoc	NSC94-2623-7009-007-AT	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/90707	-
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=1064793&docId=202559	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.language.iso	zh_TW	en_US
dc.title	ALD在Damascene銅製程應用之研究(III)	zh_TW
dc.title	The Application of ALD on Damascene Cu Metallization (III)	en_US
dc.type	Plan	en_US
dc.contributor.department	交通大學材料科學與工程系	zh_TW
Appears in Collections:	Research Plans

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