標題: Design and Test of a MEMS-Based High G Smart Sensor
作者: Wang, Y. P.
Hsu, R. Q.
Wu, C. W.
機械工程學系
Department of Mechanical Engineering
關鍵字: High G;microelectromechanical systems (MEMS);proof mass;smart sensor;spring
公開日期: 1-Apr-2011
摘要: Most conventional G sensors use cantilever beams or axial springs as triggering devices. The reaction time of these conventional G sensors are often far too long. In many high G (> 300 G) applications, they completely fail to function. This study proposed a microelectromechanical systems-based high G smart sensor, which not only functions at a very high G impact but also identifies the material when a projectile makes an impact on a hard object. This high G smart sensor is intended for use at 3000-21 000 G. The sensor was made of silicon and the triggering mechanism involves a cantilever and a spring structure. The mechanical sensitivity of the sensors can be adjusted to preset the triggering G value. Four sensors, each designated to trigger its own G value were integrated in a unit. Experiments demonstrated that this unit can identify the characteristics of an object.
URI: http://dx.doi.org/10.1109/JSEN.2010.2079325
http://hdl.handle.net/11536/9115
ISSN: 1530-437X
DOI: 10.1109/JSEN.2010.2079325
期刊: IEEE SENSORS JOURNAL
Volume: 11
Issue: 4
起始頁: 1046
結束頁: 1050
Appears in Collections:Articles


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