標題: | Influence of hydrogen plasma treatment on charge storage characteristics in high density tungsten nanocrystal nonvolatile memory |
作者: | Chen, Shih-Cheng Chang, Ting-Chang Chen, Wei-Ren Lo, Yuan-Chun Wu, Kai-Ting Sze, S. M. Chen, Jason Liao, I. H. Yeh (Huang), Fon-Shan 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics |
關鍵字: | Hydrogen plasma;Tungsten nanoclystals;Nonvolatile memory;X-ray photoelectron spectroscopy |
公開日期: | 31-三月-2011 |
摘要: | This study focuses on the influence of a hydrogen plasma treatment on electrical properties of tungsten nanocrystal nonvolatile memory. The X-ray photon emission spectra show that, after the hydrogen plasma treatment, a change in binding energy occurs such that Si(x+) and Si(y+) peaks appear at a position that is shifted about 2.3 and 3.3 eV from Si(o+) in Si 2p spectra. This indicates that Si dangling bonds are passivated to form a Si-H bond structure in the SiO(2). Furthermore, the transmission electron microscopy shows cross-sectional and plane-view for the nanocrystal microstructure after the hydrogen plasma treatment. Electrical measurement analyses show improved data retention because the hydrogen plasma treatment enhances the quality of the oxide surrounding the nanocrystals. The endurance and retention properties of the memory device are improved by about 36% and 30%, respectively. (C) 2011 Elsevier By. All rights reserved. |
URI: | http://dx.doi.org/10.1016/j.tsf.2011.01.259 http://hdl.handle.net/11536/9118 |
ISSN: | 0040-6090 |
DOI: | 10.1016/j.tsf.2011.01.259 |
期刊: | THIN SOLID FILMS |
Volume: | 519 |
Issue: | 11 |
起始頁: | 3897 |
結束頁: | 3901 |
顯示於類別: | 期刊論文 |