微影步進機之衝量定位機構(Impact Drive Mechanism)之實作---總計畫(I)

Full metadata record

DC Field	Value	Language
dc.contributor.author	成維華	en_US
dc.contributor.author	WEI-HUACHIENG	en_US
dc.date.accessioned	2014-12-13T10:33:02Z	-
dc.date.available	2014-12-13T10:33:02Z	-
dc.date.issued	2003	en_US
dc.identifier.govdoc	NSC92-2212-E009-023	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/91833	-
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=877052&docId=168252	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.language.iso	zh_TW	en_US
dc.title	微影步進機之衝量定位機構(Impact Drive Mechanism)之實作---總計畫(I)	zh_TW
dc.title	Impact Drive Mechanism Positioning for Lithography Stepper Machine (I)	en_US
dc.type	Plan	en_US
dc.contributor.department	國立交通大學機械工程研究所	zh_TW
Appears in Collections:	Research Plans

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