標題: | 光資訊關鍵性材料製程與性質研究---子計畫V:用晶圓接合與溼式蝕刻方式來剝離側向覆蓋生長之氮化鎵磊晶層(II) Lift off GaN Epitaxy Lateral Overgrowth Layer by Wafer Bonding and Wet Etching Methods (II) |
作者: | 吳耀銓 YEWCHUNG SERMONWU 國立交通大學材料科學與工程學系 |
公開日期: | 2003 |
官方說明文件#: | NSC92-2216-E009-012 |
URI: | http://hdl.handle.net/11536/92055 https://www.grb.gov.tw/search/planDetail?id=828332&docId=156981 |
Appears in Collections: | Research Plans |
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