高介電常數閘極介電層材料製備與可靠性分析

Full metadata record

DC Field	Value	Language
dc.contributor.author	林鴻志	en_US
dc.contributor.author	HORNG-CHIHLIN	en_US
dc.date.accessioned	2014-12-13T10:33:47Z	-
dc.date.available	2014-12-13T10:33:47Z	-
dc.date.issued	2003	en_US
dc.identifier.govdoc	NSC92-AT-7009-001	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/92282	-
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=884734&docId=169605	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.language.iso	zh_TW	en_US
dc.title	高介電常數閘極介電層材料製備與可靠性分析	zh_TW
dc.title	Preparation and Characterization of High-K Gate Dielectric Materials	en_US
dc.type	Plan	en_US
dc.contributor.department	國立交通大學電子工程研究所	zh_TW
Appears in Collections:	Research Plans

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