微影步進機衝量定位機構之實作---子計畫I：微影步進機之IDM定位機構動力模型分析與最佳控制(I)

Title:	微影步進機衝量定位機構之實作---子計畫I：微影步進機之IDM定位機構動力模型分析與最佳控制(I) The Dynamic Analysis and Optimal Control of Impact Drive Mechanism for Lithograph Stepper (I)
Authors:	成維華 WEI-HUACHIENG 國立交通大學機械工程研究所
Issue Date:	2003
Gov't Doc #:	NSC92-2212-E009-024
URI:	http://hdl.handle.net/11536/92459 https://www.grb.gov.tw/search/planDetail?id=877057&docId=168253
Appears in Collections:	Research Plans

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