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193奈米微影解像度增進技術---高透射率嵌附層之研製、應用探討與模擬

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2002

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https://www.grb.gov.tw/search/planDetail?id=784474&docId=150790
 https://ir.lib.nycu.edu.tw/handle/11536/93058

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研究計畫;;Research Plans

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