電極/鐵電薄膜/結緣層/半導體結構之製程與電特性劣化研究(II)

標題:	電極/鐵電薄膜/結緣層/半導體結構之製程與電特性劣化研究(II) Processing and Characteristic Degradation of Metal-Ferroelectric-Insulator-Semiconductor (II)
作者:	陳三元 CHEN SAN-YUAN 交通大學材料科學與工程系
公開日期:	2002
官方說明文件#:	NSC91-2215-E009-051
URI:	http://hdl.handle.net/11536/93066 https://www.grb.gov.tw/search/planDetail?id=784427&docId=150777
Appears in Collections:	Research Plans

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