低溫快速金屬誘發非晶矽結晶化製作複晶矽薄膜電晶體

標題:	低溫快速金屬誘發非晶矽結晶化製作複晶矽薄膜電晶體 Fabricarion of Poly-Si TFT by Low Temperature and Rapid Metal Induced Crystallization of Amorphous Si
作者:	馮明憲交通大學材料科學與工程研究所
公開日期:	2002
官方說明文件#:	NSC91-2215-E009-046
URI:	http://hdl.handle.net/11536/93070 https://www.grb.gov.tw/search/planDetail?id=784410&docId=150772
Appears in Collections:	Research Plans

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