標題: | Spin-on ZnO thin film transistors with oxidation treatment |
作者: | Huang, Chen-Shuo Chou, Yi-Teh Liu, Po-Tsun Chung, Wan-Fang Huang, Chien-Jui 光電工程學系 Department of Photonics |
公開日期: | 2007 |
摘要: | The ZnO TFTs was fabricated by spin-on method and investigated by modulating deposition environments. It was discovered that the conductivity of ZnO TFTs can be obviously changed by modulating curing temperature and the performances can be improved by incorporating oxygen. |
URI: | http://hdl.handle.net/11536/9312 |
ISBN: | 978-957-28522-4-8 |
期刊: | IDMC'07: PROCEEDINGS OF THE INTERNATIONAL DISPLAY MANUFACTURING CONFERENCE 2007 |
起始頁: | 557 |
結束頁: | 559 |
Appears in Collections: | Conferences Paper |