標題: 垂直圓柱容器中向下強制氣流流過一水平加熱晶圓之渦旋流結構與相關熱傳特性研究(I)
Mixed Convective Vortex Flow Structures and Associated Thermal Characteristics in a Downward Gas Flow over a Heated Wafer in a Cylindrical Chamber (I)
作者: 林清發
LIN TSING-FA
國立交通大學機械工程研究所
關鍵字: 渦流;晶圓;熱傳遞;垂直圓柱容器;向下強制氣流;Vortex flow;Wafer;Heat transfer;Clindrical chamber;Downward gas flow
公開日期: 2001
官方說明文件#: NSC90-2212-E009-059
URI: http://hdl.handle.net/11536/93566
https://www.grb.gov.tw/search/planDetail?id=645518&docId=121282
Appears in Collections:Research Plans