應用DSMC法模擬分析深次微米銅化學氣相沈積之熱流場及沈積度

標題:	應用DSMC法模擬分析深次微米銅化學氣相沈積之熱流場及沈積度 Using DSMC to Simulate Thermal-Flow Field on Deep Naro-meter Trench for Cu-CVD
作者:	陳俊勳 CHIUN-HSUNCHEN 交通大學機械工程系
關鍵字:	直接模擬蒙地卡羅法;銅化學氣相沈積;渠溝;DSMC method;Cu chemical vapor deposition;Trench
公開日期:	2000
官方說明文件#:	NSC89-2212-E009-024
URI:	http://hdl.handle.net/11536/93982 https://www.grb.gov.tw/search/planDetail?id=501393&docId=90414
Appears in Collections:	Research Plans

Files in This Item:

If it is a zip file, please download the file and unzip it, then open index.html in a browser to view the full text content.