完整後設資料紀錄
| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.author | 張俊彥 | en_US |
| dc.contributor.author | CHANG CHUN-YEN | en_US |
| dc.date.accessioned | 2014-12-13T10:36:41Z | - |
| dc.date.available | 2014-12-13T10:36:41Z | - |
| dc.date.issued | 2001 | en_US |
| dc.identifier.govdoc | NSC90-2215-E009-078 | zh_TW |
| dc.identifier.uri | http://hdl.handle.net/11536/94109 | - |
| dc.identifier.uri | https://www.grb.gov.tw/search/planDetail?id=665740&docId=126384 | en_US |
| dc.description.sponsorship | 行政院國家科學委員會 | zh_TW |
| dc.language.iso | zh_TW | en_US |
| dc.subject | 低溫 | zh_TW |
| dc.subject | 多晶矽鍺 | zh_TW |
| dc.subject | 薄膜電晶體 | zh_TW |
| dc.subject | 退火製程 | zh_TW |
| dc.subject | Low temperature | en_US |
| dc.subject | Poly SiGe | en_US |
| dc.subject | Thin film transistor (TFT) | en_US |
| dc.subject | Annealing process | en_US |
| dc.title | 複晶矽鍺與MILC在低溫複晶矽薄膜電晶體上之應用---子計畫III：MILC低溫複晶矽薄膜電晶體之退火製程開發、新穎結構及小尺寸元件之製作及研究(I) | zh_TW |
| dc.title | Study of Low Temperautre MILC Poly-Si Film and Its Application on Novel Strucutre Small Dimensional TFTs (I) | en_US |
| dc.type | Plan | en_US |
| dc.contributor.department | 國立交通大學電子工程學系 | zh_TW |
| 顯示於類別： | 研究計畫 | |
