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dc.contributor.author陸懋宏en_US
dc.date.accessioned2014-12-13T10:36:53Z-
dc.date.available2014-12-13T10:36:53Z-
dc.date.issued1999en_US
dc.identifier.govdocNSC88-2215-E009-009zh_TW
dc.identifier.urihttp://hdl.handle.net/11536/94246-
dc.identifier.urihttps://www.grb.gov.tw/search/planDetail?id=418384&docId=74232en_US
dc.description.sponsorship行政院國家科學委員會zh_TW
dc.language.isozh_TWen_US
dc.subject活性離子蝕刻zh_TW
dc.subject微型偏轉鏡zh_TW
dc.subject繞射元件zh_TW
dc.subject二元光學zh_TW
dc.subjectReactive ion etching (RIE)en_US
dc.subjectBeam deflection microlensen_US
dc.subjectDiffraction elementen_US
dc.subjectBinary opticsen_US
dc.title透射式微型偏轉鏡的設計與製作zh_TW
dc.titleDesign and Fabrication of the Beam Deflection Microlensen_US
dc.typePlanen_US
dc.contributor.department交通大學光電工程研究所zh_TW
Appears in Collections:Research Plans