Characterization of one-dimension edge roughness from far-field irradiance at subwavelength-scale precision

doi:10.1016/j.optcom.2007.12.032

完整後設資料紀錄

DC 欄位	值	語言
dc.contributor.author	Chu, Shu-Chun	en_US
dc.contributor.author	Chern, Jyh-Long	en_US
dc.date.accessioned	2014-12-08T15:12:18Z	-
dc.date.available	2014-12-08T15:12:18Z	-
dc.date.issued	2008-04-15	en_US
dc.identifier.issn	0030-4018	en_US
dc.identifier.uri	http://dx.doi.org/10.1016/j.optcom.2007.12.032	en_US
dc.identifier.uri	http://hdl.handle.net/11536/9450	-
dc.description.abstract	It is proposed and numerically verified that the one-dimensional edge roughness of test sample can be characterized by far-field irradiance measurement at subwavelength-scale precision with a constructed aperture playing as an optical ruler. The precision of the proposed scheme of measurement could be better than 3%, even when the edge roughness is in subwavelength-scale. The influence of sample thickness on the proposed measurement scheme is also investigated and considered. (C) 2007 Elsevier B.V. All rights reserved.	en_US
dc.language.iso	en_US	en_US
dc.subject	diffraction	en_US
dc.subject	subwavelength	en_US
dc.subject	measurement	en_US
dc.title	Characterization of one-dimension edge roughness from far-field irradiance at subwavelength-scale precision	en_US
dc.type	Article	en_US
dc.identifier.doi	10.1016/j.optcom.2007.12.032	en_US
dc.identifier.journal	OPTICS COMMUNICATIONS	en_US
dc.citation.volume	281	en_US
dc.citation.issue	8	en_US
dc.citation.spage	1997	en_US
dc.citation.epage	2001	en_US
dc.contributor.department	光電工程學系	zh_TW
dc.contributor.department	Department of Photonics	en_US
dc.identifier.wosnumber	WOS:000254566000015	-
dc.citation.woscount	2	-
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