熱動式撓性微型機構的設計與製作(II)

Full metadata record

DC Field	Value	Language
dc.contributor.author	徐文祥	en_US
dc.contributor.author	HSU WENSYANG	en_US
dc.date.accessioned	2014-12-13T10:37:47Z	-
dc.date.available	2014-12-13T10:37:47Z	-
dc.date.issued	1998	en_US
dc.identifier.govdoc	NSC87-2218-E009-015	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/94862	-
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=395592&docId=69862	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.language.iso	zh_TW	en_US
dc.subject	微機電系統	zh_TW
dc.subject	微致動器	zh_TW
dc.subject	表面細微加工	zh_TW
dc.subject	體微加工	zh_TW
dc.subject	微型夾子	zh_TW
dc.subject	Micro electromechanical system	en_US
dc.subject	Microactuator	en_US
dc.subject	Surface micromachining	en_US
dc.subject	Bulk micromachining	en_US
dc.subject	Microgripper	en_US
dc.subject	MEMS	en_US
dc.title	熱動式撓性微型機構的設計與製作(II)	zh_TW
dc.title	Design and Fabrication of Thermal-Driven Compliant Micromechanisms (II)	en_US
dc.type	Plan	en_US
dc.contributor.department	交通大學機械工程系	zh_TW
Appears in Collections:	Research Plans

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