| 標題: | 複晶矽薄膜電晶體相關技術之開發---子計畫二：高品質複晶矽薄膜電晶體介電絕緣層之研究(III) Study of High-Quality Dielectrics of Polysilicon Thin Film Transistors (III) |
| 作者: | 葉清發 交通大學電子工程系 |
| 關鍵字: | 複晶矽;液相沈積;離子披覆;保護層;薄膜電晶體;Polysilicon;Liquid-phase deposition;Ion plating;Passivation layer;Thin film transistor |
| 公開日期: | 1998 |
| 官方說明文件#: | NSC87-2215-E009-048 |
| URI: | http://hdl.handle.net/11536/95072 https://www.grb.gov.tw/search/planDetail?id=409164&docId=72450 |
| Appears in Collections: | Research Plans |
