Characterization of Si nanorods by spectroscopic ellipsometry with efficient theoretical modeling

Abstract

Spectroscopic ellipsometry (SE) is applied to characterize Si columnar nanostructures. By employing effective medium approximation (EMA) theory, Si nanorods are treated as a graded layer with each sub-layer modeled as a mixture of Si and voids with varying porosity fraction. In addition, the rigorous coupled-wave analysis and finite-element Green's function method were used in modeling Si nanorods as a stack of disks with varying diameters and thicknesses, and the calculations are in satisfactory agreement with the measurement results. (C) 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.