標題: Characterization of Si nanorods by spectroscopic ellipsometry with efficient theoretical modeling
作者: Hsu, Shih-Hsin
Liu, En-Shao
Chang, Yia-Chung
Hilfiker, James N.
Kim, Young Dong
Kim, Tae Jung
Lin, Chun-Jung
Lin, Gong-Ru
光電工程學系
Department of Photonics
公開日期: 1-Apr-2008
摘要: Spectroscopic ellipsometry (SE) is applied to characterize Si columnar nanostructures. By employing effective medium approximation (EMA) theory, Si nanorods are treated as a graded layer with each sub-layer modeled as a mixture of Si and voids with varying porosity fraction. In addition, the rigorous coupled-wave analysis and finite-element Green's function method were used in modeling Si nanorods as a stack of disks with varying diameters and thicknesses, and the calculations are in satisfactory agreement with the measurement results. (C) 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
URI: http://dx.doi.org/10.1002/pssa.200777832
http://hdl.handle.net/11536/9511
ISSN: 1862-6300
DOI: 10.1002/pssa.200777832
期刊: PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
Volume: 205
Issue: 4
起始頁: 876
結束頁: 879
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