晶圓製造廠爐管區控檔片之單迴圈網路模式

標題:	晶圓製造廠爐管區控檔片之單迴圈網路模式 A Single Loop Network Model for Dummy/Control Wafers in the Furnace Area Wafer Fabrication
作者:	彭文理 WEN LEAPEARN 國立交通大學工業工程與管理學系
關鍵字:	晶圓製造;爐管;單圈網路;半導體業;Wafer fabrication;Furnace tube;Single loop network;Semiconductor industry
公開日期:	2001
官方說明文件#:	NSC90-2218-E009-015
URI:	http://hdl.handle.net/11536/95399 https://www.grb.gov.tw/search/planDetail?id=674269&docId=128520
Appears in Collections:	Research Plans

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