晶圓製造廠爐管區控檔片之單迴圈網路模式

Title:	晶圓製造廠爐管區控檔片之單迴圈網路模式 A Single Loop Network Model for Dummy/Control Wafers in the Furnace Area Wafer Fabrication
Authors:	彭文理 WEN LEAPEARN 國立交通大學工業工程與管理學系
Keywords:	晶圓製造;爐管;單圈網路;半導體業;Wafer fabrication;Furnace tube;Single loop network;Semiconductor industry
Issue Date:	2001
Gov't Doc #:	NSC90-2218-E009-015
URI:	http://hdl.handle.net/11536/95399 https://www.grb.gov.tw/search/planDetail?id=674269&docId=128520
Appears in Collections:	Research Plans

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