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dc.contributor.author蘇翔en_US
dc.date.accessioned2014-12-13T10:38:44Z-
dc.date.available2014-12-13T10:38:44Z-
dc.date.issued1996en_US
dc.identifier.govdocNSC85-2215-E009-008zh_TW
dc.identifier.urihttp://hdl.handle.net/11536/95615-
dc.identifier.urihttps://www.grb.gov.tw/search/planDetail?id=229976&docId=41766en_US
dc.description.sponsorship行政院國家科學委員會zh_TW
dc.language.isozh_TWen_US
dc.subject同步輻射zh_TW
dc.subject深蝕光刻術zh_TW
dc.subjectSynchrotron radiationen_US
dc.subjectDeep X-ray lithographyen_US
dc.title以深蝕光刻術製作聚焦環---總計畫zh_TW
dc.titleFresnel Zone Plate Via Deep X-Ray Lithographyen_US
dc.typePlanen_US
dc.contributor.department國立交通大學電子工程研究所zh_TW
Appears in Collections:Research Plans