Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 張國明 | en_US |
| dc.contributor.author | CHANG KOW-MING | en_US |
| dc.date.accessioned | 2014-12-13T10:39:08Z | - |
| dc.date.available | 2014-12-13T10:39:08Z | - |
| dc.date.issued | 1996 | en_US |
| dc.identifier.govdoc | NSC85-2215-E009-029 | zh_TW |
| dc.identifier.uri | http://hdl.handle.net/11536/96117 | - |
| dc.identifier.uri | https://www.grb.gov.tw/search/planDetail?id=234686&docId=43084 | en_US |
| dc.description.sponsorship | 行政院國家科學委員會 | zh_TW |
| dc.language.iso | zh_TW | en_US |
| dc.subject | 微機電系統 | zh_TW |
| dc.subject | 微感測器 | zh_TW |
| dc.subject | 微致動器 | zh_TW |
| dc.subject | 微機電元件 | zh_TW |
| dc.subject | MEMS | en_US |
| dc.subject | Microsensor | en_US |
| dc.subject | Microactuator | en_US |
| dc.subject | Microdevice | en_US |
| dc.title | 微機電系統校際整合研究---子計畫一：電容性微感器及微控器元件結構設計與製造 | zh_TW |
| dc.title | Capacitive Microsensors and Microactuators Device Structure Design and Fabrication | en_US |
| dc.type | Plan | en_US |
| dc.contributor.department | 國立交通大學電子工程學系 | zh_TW |
| Appears in Collections: | Research Plans | |
