| Title: | 微機電系統校際整合研究---總計畫 Inter-Universities Collaborative Research on Micro-Electro-Mechanical Systems (MEMS) |
| Authors: | 張國明 CHANG KOW-MING 國立交通大學電子工程研究所 |
| Keywords: | 微機電系統;感測器;致動器;微小元件;微加速度計;機構設計;熱交換器;積體電路;MEMS;Sensor;Actuator;Microdevice;Micro-accelerrometer;Mechanical design;Heat exchange;IC |
| Issue Date: | 1996 |
| Gov't Doc #: | NSC85-2215-E009-028 |
| URI: | http://hdl.handle.net/11536/96125 https://www.grb.gov.tw/search/planDetail?id=234673&docId=43083 |
| Appears in Collections: | Research Plans |
