矽化鎳在超大型積體電路之應用研究(II)

Title:	矽化鎳在超大型積體電路之應用研究(II) Material Properties and Process Technology of Ni-Silicide Relevant to ULSI Applications (II)
Authors:	陳茂傑國立交通大學電子工程學系
Keywords:	矽化鎳;製程技術;極大型積體電路;材料性質;Nickel silicide;Process technology;ULSI;Material property
Issue Date:	2001
Gov't Doc #:	NSC90-2215-E009-067
URI:	http://hdl.handle.net/11536/96485 https://www.grb.gov.tw/search/planDetail?id=665699&docId=126373
Appears in Collections:	Research Plans