氮化鎵晶圓接合及配合雷射移除藍寶石基板

標題:	氮化鎵晶圓接合及配合雷射移除藍寶石基板 GaN Wafer Bonding and Laser Lift-Off the Sapphire Substrate
作者:	吳耀銓 YEWCHUNG SERMONWU 國立交通大學材料科學與工程學系
關鍵字:	晶圓接合;藍寶石基板;氮化鎵;雷射消融;Wafer bonding;Saphhire substrate;Gallium nitride;Laser ablation
公開日期:	2001
官方說明文件#:	NSC90-2216-E009-037
URI:	http://hdl.handle.net/11536/96841 https://www.grb.gov.tw/search/planDetail?id=673281&docId=128270
Appears in Collections:	Research Plans

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