标题: | 低温薄膜电晶体之相关薄绝缘层之制备研究 The Study on Thin Dielectrics Preparation Technology for Low Temperature TFTs |
作者: | 李崇仁 交通大学电子工程系 |
关键字: | 复晶矽;薄绝缘层;薄膜电晶体;化学气相沈积法;低温快速退火;准分子雷射;Polysilicon;Thin dielectric film;Thin film transistor;Chemical vapor deposition (CVD);Rapid thermal process;Excimer laser |
公开日期: | 2000 |
官方说明文件#: | NSC89-2215-E009-030 |
URI: | http://hdl.handle.net/11536/98162 https://www.grb.gov.tw/search/planDetail?id=542081&docId=99576 |
显示于类别: | Research Plans |