| Title: | 低溫薄膜電晶體之相關薄絕緣層之製備研究 The Study on Thin Dielectrics Preparation Technology for Low Temperature TFTs |
| Authors: | 李崇仁 交通大學電子工程系 |
| Keywords: | 複晶矽;薄絕緣層;薄膜電晶體;化學氣相沈積法;低溫快速退火;準分子雷射;Polysilicon;Thin dielectric film;Thin film transistor;Chemical vapor deposition (CVD);Rapid thermal process;Excimer laser |
| Issue Date: | 2000 |
| Gov't Doc #: | NSC89-2215-E009-030 |
| URI: | http://hdl.handle.net/11536/98162 https://www.grb.gov.tw/search/planDetail?id=542081&docId=99576 |
| Appears in Collections: | Research Plans |
