标题: 低温薄膜电晶体之相关薄绝缘层之制备研究
The Study on Thin Dielectrics Preparation Technology for Low Temperature TFTs
作者: 李崇仁
交通大学电子工程系
关键字: 复晶矽;薄绝缘层;薄膜电晶体;化学气相沈积法;低温快速退火;准分子雷射;Polysilicon;Thin dielectric film;Thin film transistor;Chemical vapor deposition (CVD);Rapid thermal process;Excimer laser
公开日期: 2000
官方说明文件#: NSC89-2215-E009-030
URI: http://hdl.handle.net/11536/98162
https://www.grb.gov.tw/search/planDetail?id=542081&docId=99576
显示于类别:Research Plans