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THICKNESS EFFECT ON HYDROGEN PLASMA TREATMENT ON POLYCRYSTALLINE SILICON THIN-FILMS

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Date

1995-05-29

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DOI

10.1063/1.114261

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http://dx.doi.org/10.1063/1.114261
 https://ir.lib.nycu.edu.tw/handle/11536/1912

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期刊論文;;Articles

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