| 標題: | 12吋矽晶圓半導體CVD製程設備及BST介電薄膜成長研究---子計畫I：12吋矽晶圓CVD製程設備的加熱及成長BST薄膜之進氣系統設計與反應爐系統整合(I) Design of Heating Assembly and Gas Feeding Unit for BST Thin Film Growth and Integration of CVD Reactor System for a 12-Inch Single Silicon Wafer (I) |
| 作者: | 林清發 LIN TSING-FA 交通大學機械工程系 |
| 關鍵字: | CVD反應爐;加熱設計;流力設計;CVD reactor;Heating design;Flow design |
| 公開日期: | 2000 |
| 官方說明文件#: | NSC89-2212-E009-038 |
| URI: | http://hdl.handle.net/11536/101659 https://www.grb.gov.tw/search/planDetail?id=501193&docId=90357 |
| Appears in Collections: | Research Plans |
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