低介電常數材料應用於極大型積體電路製程與材料特性分析

Full metadata record

DC Field	Value	Language
dc.contributor.author	周立人	en_US
dc.date.accessioned	2014-12-13T10:50:46Z	-
dc.date.available	2014-12-13T10:50:46Z	-
dc.date.issued	2000	en_US
dc.identifier.govdoc	NSC89-2215-E009-050	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/102315	-
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=541944&docId=99538	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.language.iso	zh_TW	en_US
dc.subject	介電常數	zh_TW
dc.subject	極大型積體電路	zh_TW
dc.subject	材料特性	zh_TW
dc.subject	Dielectric constant	en_US
dc.subject	ULSI	en_US
dc.subject	Material characteristics	en_US
dc.title	低介電常數材料應用於極大型積體電路製程與材料特性分析	zh_TW
dc.title	The Application of Low Dielectric Materials in ULSI Process and Analysis of Material Characteristics	en_US
dc.type	Plan	en_US
dc.contributor.department	交通大學電子工程研究所	zh_TW
Appears in Collections:	Research Plans

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