Title: | Nonvolatile memory characteristics of nickel-silicon-nitride nanocrystal |
Authors: | Chen, Wei-Ren Chang, Ting-Chang Liu, Po-Tsun Yeh, Jui-Lung Tu, Chun-Hao Lou, Jen-Chung Yeh, Ching-Fa Chang, Chun-Yen 電子工程學系及電子研究所 光電工程學系 顯示科技研究所 Department of Electronics Engineering and Institute of Electronics Department of Photonics Institute of Display |
Issue Date: | 20-Aug-2007 |
Abstract: | The formation of nickel-silicon-nitride nanocrystals by sputtering a comixed target in the argon and nitrogen environment is proposed in this letter. High resolution transmission electron microscope analysis clearly shows the nanocrystals embedded in the silicon nitride and x-ray photoelectron spectroscopy also shows the chemical material analysis of nanocrystals. The memory window of nickel-silicon-nitride nanocrystals enough to define 1 and 0 states is obviously observed, and a good data retention characteristic to get up to 10 years is exhibited for the nonvolatile memory application. |
URI: | http://dx.doi.org/10.1063/1.2760144 http://hdl.handle.net/11536/10425 |
ISSN: | 0003-6951 |
DOI: | 10.1063/1.2760144 |
Journal: | APPLIED PHYSICS LETTERS |
Volume: | 91 |
Issue: | 8 |
End Page: | |
Appears in Collections: | Articles |
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