标题: Method for forming vertical type sensor
作者: Zan Hsiao-Wen
Meng Hsin-Fei
Dai Ming-Zhi
Chao Yu-Chiang
公开日期: 4-十一月-2014
摘要: The present invention provides a vertical type sensor, including a substrate; a first electrode formed on the substrate; a sensing layer formed on the first electrode layer and reactive to a target substance, wherein the first electrode layer is interposed between the substrate and the sensing layer; and a second electrode layer formed on the sensing layer and having a plurality of openings, wherein the sensing layer is interposed between the first electrode layer and the second electrode layer, and the target substance contacts the sensing layer via the plurality of openings. The vertical type sensor of the present invention provides instant, sensitive and rapid detection.
官方说明文件#: G01R019/00
H01L029/08
H01L029/04
G01N033/543
H01L051/05
G01N027/327
G01N027/414
URI: http://hdl.handle.net/11536/104330
专利国: USA
专利号码: 08877535
显示于类别:Patents


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