標題: | Bonding method for three-dimensional integrated circuit and three-dimensional integrated circuit thereof |
作者: | Chen Kuan-Neng Hsu Sheng-Yao |
公開日期: | 13-八月-2013 |
摘要: | The present invention discloses a bonding method for a three-dimensional integrated circuit and the three-dimensional integrated circuit thereof. The bonding method comprises the steps of: providing a substrate; depositing a film layer on the substrate; providing a light source to light onto the film layer to form a graphic structure; forming a metal co-deposition layer by a first metal and a second metal that are co-deposited on the film layer; providing a first integrated circuit having the substrate, the film layer and the metal co-deposition layer sequentially; providing a second integrated circuit that having the metal co-deposition layer, the film layer and the substrate sequentially; and the first integrated circuit is bonded with the second integrated circuit at a predetermined temperature to form a three-dimensional integrated circuit. |
官方說明文件#: | H01L023/34 |
URI: | http://hdl.handle.net/11536/104452 |
專利國: | USA |
專利號碼: | 08508041 |
顯示於類別: | 專利資料 |