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dc.contributor.authorMay, Gary Sen_US
dc.date.accessioned2014-12-16T08:14:56Z-
dc.date.available2014-12-16T08:14:56Z-
dc.date.issued2004en_US
dc.identifier.isbn0471232793en_US
dc.identifier.urihttp://webpac.lib.nctu.edu.tw/F/?func=item-global&doc_library=TOP01&doc_number=000170651en_US
dc.identifier.urihttp://hdl.handle.net/11536/106823-
dc.language.isozh_TWen_US
dc.publisherWileyen_US
dc.titleFundamentals of semiconductor fabricationzh_TW
dc.typeBooksen_US
Appears in Collections:Books