A novel method to improve VCSELs oxide-confined aperture uniformity using selective As+-implanted underlying layer

Abstract

We report the utilization of an selective As+-implanted underlying layer and regrowth method to enhance and control the wet thermal oxidation rate for 850 nm oxide-confined VCSEL. The oxidation rate of the As'-implanted device showed a four-fold increase over the non-implanted one at the As' dosage of 1 x 10(16) cm(-1) and the oxidation temperature of 400 degrees C. The 50 side-by-side As'-implanted oxide-confined VCSELs fabricated using the method achieved very uniform performance with a deviation in threshold current Of Delta I-th similar to 0.2 mA and slope-efficiency of Delta S.E. similar to 3%. Finally, we accumulated life test data for oxide-confined VCSELs with As'-implanted underlying layer up to 1000 h at 80 degrees C/15 mA. (c) 2005 Elsevier B.V. All rights reserved.